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Publications

Being a leading-edge technology center for advanced photomasks, the AMTC´s main focus in on technological research and development within the photomask and semiconductor industry. The results of our R&D activities are published, amongst others, at international conferences.

Below you find AMTC related research publications. All files are smaller than 1,0 MB unless stated differently.

EMLC 2010

SPIE 2010


© 2010 Society of Photo-Optical Instrumentation Engineers (SPIE)

PMJ 2010


© 2010 Photomasks Japan

BACUS 2010


© 2010 Society of Photo-Optical Instrumentation Engineers (SPIE) 


EMLC 2009

SPIE 2009


© 2009 Society of Photo-Optical Instrumentation Engineers (SPIE)

SEMICON Korea 2009


© 2009 SEMICON Korea


EMLC 2008


PMJ 2008


© 2008 Photomasks Japan


BACUS 2007


© 2007 Society of Photo-Optical Instrumentation Engineers (SPIE)

EMLC 2007


SPIE 2007


© 2007 Society of Photo-Optical Instrumentation Engineers (SPIE)

PMJ 2007


© 2007 Photomasks Japan


BACUS 2006


© 2006 Society of Photo-Optical Instrumentation Engineers (SPIE)

EUV Symposium 2006


MathMod 2006


© 2006 ARGESIM ASIM, Wien

EMLC 2006


SPIE 2006


© 2006 Society of Photo-Optical Instrumentation Engineers (SPIE)

PMJ 2006


© 2006 Photomasks Japan

Solid State Chemistry 2006


BACUS 2005


© 2005 Society of Photo-Optical Instrumentation Engineers (SPIE)

EMLC 2005


SPIE 2005


© 2005 Society of Photo-Optical Instrumentation Engineers (SPIE)

PMJ 2005


© 2005 Photomasks Japan


BACUS 2004


© 2004 Society of Photo-Optical Instrumentation Engineers (SPIE)

EMLC 2004


SPIE 2004


© 2004 Society of Photo-Optical Instrumentation Engineers (SPIE)

PMJ 2004


© 2004 Photomasks Japan